15 April 1997 Spectral-component monitoring and control of pulsed laser deposition of YBCO films
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We examine the time-resolved spectral components emitted at approximately 327 nm and approximately 550 nm in YBCO plumes during pulsed laser deposition of thin films using a KrF excimer laser at (lambda) equals 248 nm. The studied emission signals last for approximately 20 microsecond(s) ec, and show variations when process parameters such as laser power, laser excitation voltage, beam focus, chamber pressure, substrate temperature, pulse repetition rate, and target rotation rate are changed. These signals are also dependent on other factors such as target wear and age of the laser gas mixture. Spectral-component monitoring is a supplementary method of real-time plume evaluation, and allows observation of changes both prior to deposition and during the actual deposition. Adjustments can be made to the process parameters to make the plume conform to criteria necessary for the growth of films with specific qualities. The use of these spectral components as real-time process- control state variables for more reproducible fabrication of high quality thin films will be assessed.
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Rand R. Biggers, Rand R. Biggers, Paul T. Murray, Paul T. Murray, David B. Mast, David B. Mast, I. Maartense, I. Maartense, T. L. Peterson, T. L. Peterson, D. Dempsey, D. Dempsey, C. Varanasi, C. Varanasi, S. Murray, S. Murray, D. P. Lubbers, D. P. Lubbers, S. Laube, S. Laube, B. Lovett, B. Lovett, Eric K. Moser, Eric K. Moser, J. L. Brown, J. L. Brown, D. C. Liptak, D. C. Liptak, John D. Busbee, John D. Busbee, "Spectral-component monitoring and control of pulsed laser deposition of YBCO films", Proc. SPIE 2999, Photodetectors: Materials and Devices II, (15 April 1997); doi: 10.1117/12.271207; https://doi.org/10.1117/12.271207

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