4 April 1997 Influence of impurities on luminescence of Er-doped silicon structures
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Proceedings Volume 3002, Light-Emitting Diodes: Research, Manufacturing, and Applications; (1997); doi: 10.1117/12.271042
Event: Photonics West '97, 1997, San Jose, CA, United States
Abstract
The investigation of photo- and electroluminescence in erbium-doped silicon additionally co-implanted with oxygen, phosphorus and boron show an enhancement of the 1.54 micrometers line luminescence intensity in Si:Er:O and Si:Er:O:P and an intensity quenching in Si:Er:O:B as compared with Si:Er. A threshold in dependence of defect-related line electroluminescence signal on drive current is observed too. A model describing the observed variations of luminescence spectra in dependence on implantation and annealing conditions is presented. Optimization of technological regimes resulted in formation of light emitting erbium-doped silicon structures operating at room temperature.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nikolai A. Sobolev, Oleg V. Aleksandrov, Mikhail S. Bresler, Oleg B. Gusev, Pavel E. Khakuashev, Yurii A. Kudryavtsev, Miroslav I. Makoviichuk, Yurii A. Nikolaev, Petr E. Pak, Evgenii O. Parshin, Elena I. Shek, Mikhail A. Trishenkov, Aleksey O. Zakhar'in, "Influence of impurities on luminescence of Er-doped silicon structures", Proc. SPIE 3002, Light-Emitting Diodes: Research, Manufacturing, and Applications, (4 April 1997); doi: 10.1117/12.271042; https://doi.org/10.1117/12.271042
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KEYWORDS
Erbium

Electroluminescence

Luminescence

Phosphorus

Silicon

Ions

Annealing

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