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4 April 1997 Fabrication issues of oxide-confined VCSELs
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To insert high performance oxide-confined vertical-cavity surface-emitting lasers (VCSELs) into the manufacturing arena, we have examined the critical parameters that must be controlled to establish a repeatable and uniform wet thermal oxidation process for AlGaAs. These parameters include the AlAs mole fraction, the sample temperature, the carrier gas flow and the bubbler water temperature. Knowledge of these critical parameters has enabled the compilation of oxidation rate data for AlGaAs which exhibits an Arrhenius rate dependence. The compositionally dependent activation energies for AlxGa1-xAs layers of x equals 1.00, 0.98 and 0.92 are found to be 1.24, 1.75, and 1.88 eV, respectively.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kent M. Geib, Kent D. Choquette, Hong Q. Hou, and B. Eugene Hammons "Fabrication issues of oxide-confined VCSELs", Proc. SPIE 3003, Vertical-Cavity Surface-Emitting Lasers, (4 April 1997);

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