4 April 1997 Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect
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Abstract
We report the fabrication of tilted gratings on polyimide waveguides. The reported gratings provide an effective unidirectional surface-normal optical couple-in and couple- out for polymer-based optoelectronic interconnects. Such a planarized grating is particularly suitable for wafer-scale MCM optoelectronic interconnects due to its unique non- blocking fanout feature. both surface-normal input and output grating couplers have been demonstrated for the first time on polyimide waveguides on silicon substrate.
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Feiming Li, Feiming Li, Linghui Wu, Linghui Wu, Ting Li, Ting Li, Michael Dubinovsky, Michael Dubinovsky, Suning Tang, Suning Tang, Ray T. Chen, Ray T. Chen, } "Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect", Proc. SPIE 3005, Optoelectronic Interconnects and Packaging IV, (4 April 1997); doi: 10.1117/12.271081; https://doi.org/10.1117/12.271081
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