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4 April 1997 Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect
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We report the fabrication of tilted gratings on polyimide waveguides. The reported gratings provide an effective unidirectional surface-normal optical couple-in and couple- out for polymer-based optoelectronic interconnects. Such a planarized grating is particularly suitable for wafer-scale MCM optoelectronic interconnects due to its unique non- blocking fanout feature. both surface-normal input and output grating couplers have been demonstrated for the first time on polyimide waveguides on silicon substrate.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Feiming Li, Linghui Wu, Ting Li, Michael Dubinovsky, Suning Tang, and Ray T. Chen "Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect", Proc. SPIE 3005, Optoelectronic Interconnects and Packaging IV, (4 April 1997);

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