22 January 1997 Integration of GaAs/AlGaAs SQW laser and MQW modulator via a tapered waveguide interconnect without regrowth
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Abstract
A novel monolithic integration of GaAs/AlGaAs single quantum well laser and multiple quantum well modulator via a tapered waveguide interconnect is demonstrated. The integration scheme eliminates the requirement for the material regrowth without sacrificing device design and fabrication flexibility. The key technologies and the performance of the integrated laser-modulator are discussed.
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Suning Xie, Suning Xie, S. Sinha, S. Sinha, Ramu V. Ramaswamy, Ramu V. Ramaswamy, } "Integration of GaAs/AlGaAs SQW laser and MQW modulator via a tapered waveguide interconnect without regrowth", Proc. SPIE 3006, Optoelectronic Integrated Circuits, (22 January 1997); doi: 10.1117/12.264220; https://doi.org/10.1117/12.264220
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