25 April 1997 Distributed micromachined sensor networks
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Abstract
Researchers at the Honeywell Technology Center are currently developing a new type of high-performance optical sensor which is a `hybrid' micromachined silicon/fiber optic sensor that utilizes the best attributes of each technology. Fiber optics provides a nearly noise free method to read out the sensor without electrical power required at the measurement point. The micromachined silicon STORM (Sensor Transduction by Optically Resonant Microbeams) devices provide a method to design many different types of sensors such as temperature, pressure, acceleration, or magnetic field, and report the sensor data using FM encoding methods. Testing results have demonstrated relaxed alignment tolerance in packaging these devices with excellent SNR. Networks of 16 or more sensors are currently being developed.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark L. Wilson, Mark L. Wilson, William R. Herb, William R. Herb, David W. Burns, David W. Burns, J. David Zook, J. David Zook, } "Distributed micromachined sensor networks", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); doi: 10.1117/12.273840; https://doi.org/10.1117/12.273840
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