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25 April 1997 Integrated optics in silicon: coming of age
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Abstract
This paper describes the maturation of silicon on insulator technology in integrated optics. Results are presented of optical elements, showing their viability in such fields as telecommunications. Low cost packaging schemes are presented, allowing passive alignment of optical fibers in etched V grooves to the single mode ridge waveguides with an excess loss < 0.5 dB. We then discuss device applications for this technology.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arnold Peter Roscoe Harpin "Integrated optics in silicon: coming of age", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); https://doi.org/10.1117/12.273845
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