25 April 1997 Silicon-on-insulator guided-wave structures for thermo-optic switching applications
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A theoretical study aimed at the optimum design of thermo- optic guided-wave switches realized in silicon-on-oxide technology is reported. The heat transfer processes occurring inside such devices are analyzed by means of a 3D finite element thermal simulator. In particular, in rib waveguiding structures, we demonstrate that the optimum values of the oxide layer thickness and of the outer rib height are a function of the heating pulse power used to drive the device. The theoretical results carried out are consistent with the experiments reported in literature.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ivo Rendina, Ivo Rendina, Giuseppe Cocorullo, Giuseppe Cocorullo, Francesco G. Della Corte, Francesco G. Della Corte, } "Silicon-on-insulator guided-wave structures for thermo-optic switching applications", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); doi: 10.1117/12.273853; https://doi.org/10.1117/12.273853

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