25 April 1997 Using the ASOC optoelectronic IC process through foundry services
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Abstract
Conducting applications research and exploiting the full potential of integrated optical circuits (IOC) could substantially benefit from the availability of a production method along the lines of microelectronic processes such as CMOS or bipolar. This article describes a process known as Active Silicon integrated Optical Circuits (ASOCTM) which addresses this issue and which may provide a generic technique to allow researchers to explore more efficiently the full potential of IOCs.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew G. Rickman, "Using the ASOC optoelectronic IC process through foundry services", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); doi: 10.1117/12.273837; https://doi.org/10.1117/12.273837
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