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11 April 1997 Assembling of micro-optical components
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Abstract
In future most microoptical components will be applied as hybrid integrated systems. The manufacturing of beam shaping optics consisting of two or more microoptical components in a hybrid microsystem places demanding requirements on the assembling process due to the need for extreme positioning accuracy. The basis of the micro-assembly system is a high- precision robot. The robot is used to handle, to grip and to join the components with minimal position deviations. Various vacuum grippers are described. The dispensing of adhesive drops of approximately 5-30 nl volume is an essential part of the task.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guenther Tittelbach, Ramona Eberhardt, and Volker Guyenot "Assembling of micro-optical components", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271419
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