Assembling of micro-optical components

Guenther Tittelbach; Ramona Eberhardt; Volker Guyenot

doi:10.1117/12.271419

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11 April 1997 Assembling of micro-optical components

Guenther Tittelbach, Ramona Eberhardt, Volker Guyenot

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Proceedings Volume 3008, Miniaturized Systems with Micro-Optics and Micromechanics II; (1997) https://doi.org/10.1117/12.271419
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

In future most microoptical components will be applied as hybrid integrated systems. The manufacturing of beam shaping optics consisting of two or more microoptical components in a hybrid microsystem places demanding requirements on the assembling process due to the need for extreme positioning accuracy. The basis of the micro-assembly system is a high- precision robot. The robot is used to handle, to grip and to join the components with minimal position deviations. Various vacuum grippers are described. The dispensing of adhesive drops of approximately 5-30 nl volume is an essential part of the task.

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Guenther Tittelbach, Ramona Eberhardt, and Volker Guyenot "Assembling of micro-optical components", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271419

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