InP-based micromechanical tunable and selective photodetector for WDM systems

Christian Seassal; Jean Louis Leclercq; Xavier Letartre; A. Gagnaire; Michel Gendry; Pierre Viktorovitch; J. P. Laine; F. Sidoroff; Ronan Le Dantec; C. Miu; Taha Benyattou; Gerard Guillot; D. Rondi; Robert R. Blondeau

doi:10.1117/12.271441

11 April 1997 InP-based micromechanical tunable and selective photodetector for WDM systems

Christian Seassal, Jean Louis Leclercq, Xavier Letartre, A. Gagnaire, Michel Gendry, Pierre Viktorovitch, J. P. Laine, F. Sidoroff, Ronan Le Dantec, C. Miu, Taha Benyattou, Gerard Guillot, D. Rondi, Robert R. Blondeau

Author Affiliations +

Proceedings Volume 3008, Miniaturized Systems with Micro-Optics and Micromechanics II; (1997) https://doi.org/10.1117/12.271441
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The design and the fabrication of vertical InP-based micro- opto-electro-mechanical devices are reported. These are based on micromachined III-V semiconductor structures realized by selective removal of adapted sacrificial layers in order to produce Fabry-Perot resonant microcavity. Continuous wavelength running of 50nm around 1.55 micrometers for a 15 volt bias actuation has been demonstrated. Resonant peak full width at half maximum of about 10 nm at 1.5 micrometers has been performed on a InP/air gap multilayered interferometric filter. The integration of absorbing layers inside the cavity will allow us to realize resonant cavity enhanced photonic devices with thinner, and therefore faster, photodetector structures with high quantum efficiencies.

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Christian Seassal, Jean Louis Leclercq, Xavier Letartre, A. Gagnaire, Michel Gendry, Pierre Viktorovitch, J. P. Laine, F. Sidoroff, Ronan Le Dantec, C. Miu, Taha Benyattou, Gerard Guillot, D. Rondi, and Robert R. Blondeau "InP-based micromechanical tunable and selective photodetector for WDM systems", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271441

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