Translator Disclaimer
11 April 1997 Method of computer-controlled microlens processing and testing
Author Affiliations +
Abstract
Computer controlled process of microlens manufacturing and testing is described. Lens figuring is made by high energy CO2 laser beam scanning over surface. Testing procedure is realized in the same installation without removal of manufactured lens. Test uses low energy He-Ne laser beam scanning over entrance pupil of lens using the same scanning system as during manufacturing procedure. Testing method is based on principles of Hartmann test but do not use any diaphragm. The least squares method is used to determine coefficients of Zernike polynomial expansion, describing testing lens surface figuring errors.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sergey A. Rodionov, Vadim P. Veiko, Alexander T. Shakola, Vitaly M. Domnenko, and Vadim A. Patlaty "Method of computer-controlled microlens processing and testing", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271428
PROCEEDINGS
5 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top