11 April 1997 Optical characterization methods of InP-based micro-opto-electro-mechanical systems
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We have studied actuable suspended beams that form vertical optical resonant cavities. They are fabricated by sacrificial layers etching techniques on InP. They can be used as tunable optical filters for telecommunication applications. In this paper, we report optical characterizations of those devices. We have used micro reflectivity and optical profilometer measurements to make those characterizations. We have developed a micro- reflectivity experimental setup which uses the confocal principle. We have shown the deformation of the suspended beams and the variation of the reflectivity response induced by electrostatic actuation of the devices.
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Ronan Le Dantec, Ronan Le Dantec, Taha Benyattou, Taha Benyattou, Gerard Guillot, Gerard Guillot, Christian Seassal, Christian Seassal, Jean Louis Leclercq, Jean Louis Leclercq, Xavier Letartre, Xavier Letartre, A. Gagnaire, A. Gagnaire, Michel Gendry, Michel Gendry, Pierre Viktorovitch, Pierre Viktorovitch, Ramdane Benferhat, Ramdane Benferhat, D. Rondi, D. Rondi, Robert R. Blondeau, Robert R. Blondeau, } "Optical characterization methods of InP-based micro-opto-electro-mechanical systems", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271421; https://doi.org/10.1117/12.271421

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