11 April 1997 Optical communication link using micromachined corner cube reflector
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An optical communication link using a micromachined corner cube reflector (CCR) was demonstrated to transmit digital signals over a range of 2 meters by reflecting an interrogating laser from a 5mW laser source. The surface micromachined CCRs are made of 250micrometers square hinged polysilicon plates and have measured reflectance ranging from 34 percent to 77 percent for different mirror designs. LIght reflected by the CCRs has a divergence ranging from 15-35mrad. The CCRs are electrostatically actuated with 10 to 20V. The highest data rate transmitted with a CCR is 1K bps. Theoretical analysis and some dynamic optical test results of the device are presented.
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Patrick B. Chu, Patrick B. Chu, Nanping R. Lo, Nanping R. Lo, Erik Berg, Erik Berg, Kristofer S. J. Pister, Kristofer S. J. Pister, } "Optical communication link using micromachined corner cube reflector", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271414; https://doi.org/10.1117/12.271414

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