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11 April 1997 Optical probe for micromachine performance analysis
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Abstract
Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and fabrication processes, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 micrometers in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. We describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. We present experimental results obtained with a prototype optical probe and micromachines developed at Sandia National Laboratories.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fred M. Dickey, Scott C. Holswade, Norman F. Smith, and Samuel L. Miller "Optical probe for micromachine performance analysis", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271440
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