11 April 1997 Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror
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Abstract
For achieving higher performance and for miniaturizing the size of an optical scanning sensor, raising the scanning angle response, increasing the accuracy of detection of the scanning location independent from the environmental temperature, and miniaturizing an optical-scanning sensor were considered. And the silicon micromachined 2D optical scanner integrated with a piezoresistor for scanning location detection and a photodiode for optical intensity detection was newly designed and fabricated. The obtained results with the fabricated scanner are following. The scanner is capable of scanning a light beam more than 40 degrees 2D. The scanning angle sensitivities are 4.8 deg/V for horizontal direction and 10.5 deg/V for vertical direction. The scanning location detection sensitivity for each horizontal and vertical directions are 21 mV/deg and 26 mV/deg., respectively. The decrease of detection accuracy of scanning location has been reduced to less than 1 percent within +/- 10 degrees C temperature shift. And the photodetector has a photosensitivity of 0.33 A/W which allows the optical-scanning sensor to detect the reflected light intensity from an object which is 200 mm away from the sensor.
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Masaaki Ikeda, Masaaki Ikeda, Hiroshi Goto, Hiroshi Goto, Hiromi Totani, Hiromi Totani, Minoru Sakata, Minoru Sakata, Tsuneji Yada, Tsuneji Yada, } "Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271406; https://doi.org/10.1117/12.271406
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