15 April 1997 Focusing properties of a micromachined electron lens
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Abstract
The probe forming capability of a microfabricated silicon electrostatic electron lens is under investigation. The lens measures 7 mm by 9 mm by 1.64 mm and consists of three silicon electrodes separated by Pyrex optical fibers. A test structure was designed to house the micromachined lens and a commercially available electron emitter as well as deflectors and an electron detector. Images of a 1000 mesh gold TEM wire grid at a working distance of 4 mm are being obtained at magnifications greater than 10,000 X. Data from the images will be analyzed to estimate the quality of the electron beam.
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David A. Crewe, David A. Crewe, Marvin M. Ruffin, Marvin M. Ruffin, Alan D. Feinerman, Alan D. Feinerman, } "Focusing properties of a micromachined electron lens", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271218; https://doi.org/10.1117/12.271218
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