15 April 1997 Focusing properties of a micromachined electron lens
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The probe forming capability of a microfabricated silicon electrostatic electron lens is under investigation. The lens measures 7 mm by 9 mm by 1.64 mm and consists of three silicon electrodes separated by Pyrex optical fibers. A test structure was designed to house the micromachined lens and a commercially available electron emitter as well as deflectors and an electron detector. Images of a 1000 mesh gold TEM wire grid at a working distance of 4 mm are being obtained at magnifications greater than 10,000 X. Data from the images will be analyzed to estimate the quality of the electron beam.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David A. Crewe, David A. Crewe, Marvin M. Ruffin, Marvin M. Ruffin, Alan D. Feinerman, Alan D. Feinerman, } "Focusing properties of a micromachined electron lens", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271218; https://doi.org/10.1117/12.271218

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