15 April 1997 Near-field optical microscopy nanoarray
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Abstract
Multiplexing near-field scanning optical microscopy (NSOM) by the use of a nanoarray with parallel imaging is studied. The fabrication, characterization, and utilization of nanoarrays with approximately 100 nm diameter apertures spaced 500 nm center-to-center is presented. Extremely uniform nanoarrays with approximately 108 apertures were fabricated by electron beam lithography and reactive ion etching. The nanoarrays were characterized by atomic force microscopy and scanning electron microscopy. In this paper we utilize these nanoarrays in a laser-illuminated microscope with parallel detection on a charge-coupled device. Detection of B-phycoerythrin molecules using near- field illumination is presented. In principle, our system can be used to obtain high lateral resolution NSOM images over a wide-field of view (e.g. 50 - 100 micrometers ) within seconds.
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David J. Semin, W. Patrick Ambrose, Peter M. Goodwin, Joel R. Wendt, Richard A. Keller, "Near-field optical microscopy nanoarray", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271219; https://doi.org/10.1117/12.271219
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