15 May 1997 Replicating diffractive optical elements on DuPont photopolymer by optical lithography using a HEBS-glass gray-scale mask
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Abstract
Diffractive optical elements (DOEs) of the kinoform type have been fabricated on DuPont photopolymer by using a gray scale mask technology. The fabricated DOEs have high diffraction efficiency and low noise. Compared with the conventional DOE fabrication the new process is rather simple and does not involve expensive capital equipment such as mask aligners and dry etching systems, and can be extended to mass production.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pin Long, Pin Long, Walter Daschner, Walter Daschner, Eric Johnson, Eric Johnson, Sing H. Lee, Sing H. Lee, } "Replicating diffractive optical elements on DuPont photopolymer by optical lithography using a HEBS-glass gray-scale mask", Proc. SPIE 3010, Diffractive and Holographic Device Technologies and Applications IV, (15 May 1997); doi: 10.1117/12.274406; https://doi.org/10.1117/12.274406
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