15 April 1997 Image preprocessing to improve the reliability of normalized correlation
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Abstract
Machine vision based alignment is a fundamental feature of many types of semiconductor manufacturing equipment, and normalized correlation based pattern finding remains commercially popular as a core of the alignment systems. Despite its strengths, normalized correlation search (NCS) alone often fails to find the correct pattern when given the kind of degradations and nonlinear image variations seen in some semiconductor processes. This paper discusses the utilization of image processing prior to the execution of the NCS algorithm as a way to improve alignment reliability.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Douglas D. Bacon, Douglas D. Bacon, } "Image preprocessing to improve the reliability of normalized correlation", Proc. SPIE 3029, Machine Vision Applications in Industrial Inspection V, (15 April 1997); doi: 10.1117/12.271243; https://doi.org/10.1117/12.271243
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