19 June 1997 Application of PZT thin films in microelectromechanical systems
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Piezoelectric thin films have been integrated with silicon microfabrication methods in the formation of both sensors and actuators (commonly called MEMS). This work describes several applications of merged PZT thin film technology, solid-state micromachining, and silicon-based integrated circuit fabrication methods in the formation of acoustic emission microsensors, cantilever microbeam accelerometers, diaphragm micropumps, and cantilever microvalves. When combined with CMOS-based integrated circuits, these sensors and actuators form smart microelectromechanical systems with potentially low-cost and high performance.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dennis L. Polla, "Application of PZT thin films in microelectromechanical systems", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); doi: 10.1117/12.276603; https://doi.org/10.1117/12.276603


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