Gray-scale deformable grating spatial light modulator for high-speed optical processing

Miles L. Scott; Lawrence A. Bieber; Thottam S. Kalkur

doi:10.1117/12.276600

19 June 1997 Gray-scale deformable grating spatial light modulator for high-speed optical processing

Miles L. Scott, Lawrence A. Bieber, Thottam S. Kalkur

Proceedings Volume 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.276600
Event: Smart Structures and Materials '97, 1997, San Diego, CA, United States

Abstract

Gray scale deformable grating spatial light modulators have been fabricated using surface MEMS processes and are being tested prior to integration with addressing silicon backplanes. Modulation rates in excess of 100 kHz have been observed with test devices as have modulation depths nearing 40 dB.

Citation Download Citation

Miles L. Scott, Lawrence A. Bieber, and Thottam S. Kalkur "Gray-scale deformable grating spatial light modulator for high-speed optical processing", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); https://doi.org/10.1117/12.276600

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