19 June 1997 Gray-scale deformable grating spatial light modulator for high-speed optical processing
Author Affiliations +
Abstract
Gray scale deformable grating spatial light modulators have been fabricated using surface MEMS processes and are being tested prior to integration with addressing silicon backplanes. Modulation rates in excess of 100 kHz have been observed with test devices as have modulation depths nearing 40 dB.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Miles L. Scott, Miles L. Scott, Lawrence A. Bieber, Lawrence A. Bieber, Thottam S. Kalkur, Thottam S. Kalkur, "Gray-scale deformable grating spatial light modulator for high-speed optical processing", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); doi: 10.1117/12.276600; https://doi.org/10.1117/12.276600
PROCEEDINGS
8 PAGES


SHARE
Back to Top