Low-cost patterning and etching systems for production of microelectronic modules

Kanti Jain; Thomas J. Dunn

doi:10.1117/12.276627

19 June 1997 Low-cost patterning and etching systems for production of microelectronic modules

Kanti Jain, Thomas J. Dunn

Proceedings Volume 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.276627
Event: Smart Structures and Materials '97, 1997, San Diego, CA, United States

Abstract

Anvik Corporation has developed a class of novel projection systems that provide both high-throughput resist patterning and dielectric photoetching for production of a variety of electronic modules including flat panel displays, multichip modules, microelectromechanical systems, and printed circuit boards. This new technology eliminates the limitations of current lithography tools, including contact and proximity tools, conventional projection systems, steppers and scanners, and direct-write machines. Further, the Anvik system is highly modular, thereby providing equipment upgradability as well as choice of user-specified system configurations. These results are achieved with a novel seamless scanning concept and stage system configurations that provide both high optical and scanning efficiencies, and enable incorporation of a high-speed automatic part loader and an automatic alignment system. We describe the new technology and present results which demonstrate 3 micron resolution in commercial photoresists.

Citation Download Citation

Kanti Jain and Thomas J. Dunn "Low-cost patterning and etching systems for production of microelectronic modules", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); https://doi.org/10.1117/12.276627

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available