Dependence of optical constants of AZ BARLi bottom coating on bake conditions

Ralph R. Dammel; John P. Sagan; Ron A. Synowicki

doi:10.1117/12.275896

7 July 1997 Dependence of optical constants of AZ BARLi bottom coating on bake conditions

Ralph R. Dammel, John P. Sagan, Ron A. Synowicki

Proceedings Volume 3049, Advances in Resist Technology and Processing XIV; (1997) https://doi.org/10.1117/12.275896
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

The optical constants of AZ^RBARLi^TM bottom coat have been determined by spectroscopic ellipsometry as a function of bake conditions. Cauchy parameters are reported as a function of bake conditions for three film thicknesses, corresponding to the first three minima of the reflectivity versus AZ^RBARLi^TM film thickness curve. Full dispersion curves were obtained for constant spin speed and constant thickness conditions. It is found that the k dispersion curves show a slope change at 160 - 170 degrees Celsius bake temperature which is tentatively attributed to dye depletion and the formation of a graded layer in the bottom coat.

Citation Download Citation

Ralph R. Dammel, John P. Sagan, and Ron A. Synowicki "Dependence of optical constants of AZ BARLi bottom coating on bake conditions", Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); https://doi.org/10.1117/12.275896

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