7 July 1997 Novel process of isolating novolac resin fractions
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Typical phenol/formaldehyde resin syntheses generate a broad distribution of molecular weight fragments with a wide polydispersity. A process was developed to isolate novolak resin fractions of narrow polydispersity from phenol- formaldehyde condensation products in ethyl lactate without any high temperature distillation. The characterization and the performance of these fractions in i-line photoresist composition are discussed.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Dalil Rahman, M. Dalil Rahman, Ping-Hung Lu, Ping-Hung Lu, Michelle M. Cook, Michelle M. Cook, } "Novel process of isolating novolac resin fractions", Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); doi: 10.1117/12.275863; https://doi.org/10.1117/12.275863

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