Overlay measurements and edge detection methods

Alexander I. Zaslavsky

doi:10.1117/12.275928

7 July 1997 Overlay measurements and edge detection methods

Alexander I. Zaslavsky

Proceedings Volume 3050, Metrology, Inspection, and Process Control for Microlithography XI; (1997) https://doi.org/10.1117/12.275928
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

In order to perform an overlay measurement, one must use some edge detection method. Different edge detection methods have different sensitivity to noise. We define a large class of edge detection methods, and find in this class the methods least sensitive to noise. We consider continuous as well as discrete signals, and use different assumptions about the nature of noise.

Citation Download Citation

Alexander I. Zaslavsky "Overlay measurements and edge detection methods", Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); https://doi.org/10.1117/12.275928

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available