Minimization of DUV multi-interference effect in 0.25-um device fabrication

Ju-Hwan Kim; Seung-Chan Moon; Bong-Sang Ko; Hee Kook Park; Tae-Gook Lee; Ki-Soo Shin; Daehee Kim

doi:10.1117/12.276018

7 July 1997 Minimization of DUV multi-interference effect in 0.25-μm device fabrication

Ju-Hwan Kim, Seung-Chan Moon, Bong-Sang Ko, Hee Kook Park, Tae-Gook Lee, Ki-Soo Shin, Daehee Kim

Proceedings Volume 3051, Optical Microlithography X; (1997) https://doi.org/10.1117/12.276018
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

Pattern collapse, CD (critical dimension) non-uniformity, and poor pattern fidelity induced by the multi-interference effect of DUV process are currently becoming significant issues to an actual process implementation. In the micro- device fabrication of DRAM, capacitor storage node patterning designed with a rectangular shape of sub- quartermicron spacewidth is critically involved in these issues dependent on the process scheme of capacitor formation. In this study, we have evaluated the effect of barrier layers such as thin poly film, inorganic and organic BARC to minimize a thin film multi-interference effect. In addition, illumination source effect during the exposure process and process polarity effect of a positive and negative tone process were also experimented to settle down process control stability.

Citation Download Citation

Ju-Hwan Kim, Seung-Chan Moon, Bong-Sang Ko, Hee Kook Park, Tae-Gook Lee, Ki-Soo Shin, and Daehee Kim "Minimization of DUV multi-interference effect in 0.25-μm device fabrication", Proc. SPIE 3051, Optical Microlithography X, (7 July 1997); https://doi.org/10.1117/12.276018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available