13 February 1997 SAW NO2 sensors employing copper phthalocyanine as the chemical interface
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Proceedings Volume 3054, Optoelectronic and Electronic Sensors II; (1997) https://doi.org/10.1117/12.266702
Event: Optoelectronic and Electronic Sensors II, 1996, Szczyrk, Poland
Abstract
This paper presents some problems concerned with SAW NO2 sensors employing copper phthalocyanine (PcCu) as the chemical interface. The influence of piezoelectric substrate materials, crystalline structure and geometry of the PcCu coatings on the sensor sensitivity, and on temperature stability of generated frequency is discussed. The experiments were carried out for SAW delay lines on STX quartz and 128 degree(s)YX lithium niobate. Our measurements concerned PcCu coating of (alpha) and (Beta) structure. We varied the coating layer thickness from 0.1 micrometers to 1.5 micrometers and its density from 0.17 g/cm3 to 1.6 g/cm3. It was found that for the investigated range of parameters the (Beta) -PcCu layer provides several times bettor sensor sensitivity and temperature stability of SAW delay line generation frequency than (alpha) -PcCu layer of the same mass. This is valid for both used substrates.
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Judyta Hechner, Judyta Hechner, Tadeusz Wrobel, Tadeusz Wrobel, } "SAW NO2 sensors employing copper phthalocyanine as the chemical interface", Proc. SPIE 3054, Optoelectronic and Electronic Sensors II, (13 February 1997); doi: 10.1117/12.266702; https://doi.org/10.1117/12.266702
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