27 June 1997 Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition
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Abstract
The preceding paper in these proceedings provided a detailed discussion of colloidal and crystalline-phase chlorine-doped carbon nitride (CNx:Cl) films synthesized by electron cyclotron resonance (ECR) chemical vapor deposition (CVD). This paper focuses on diamond-like carbon (DLC) and hydrogenated carbon-nitride (CNx:H) films deposited by ECR-CVD in either a nitrogen- or an argon-high-density plasma using one of the following hydrocarbon precursors; trichloroethylene, tetrachloroethylene, neopentane or ethylene. For clarity, results and discussions for the CNx:Cl deposits are presented again. Electron spectroscopy for chemical analysis (ESCA) and Fourier transform infrared (FTIR) spectroscopy show that the ECR-CVD experiments so far have resulted in four distinctly different chemical compositions; CNx:Cl, CNx:H, hydrogenated amorphous carbon (a-C:H) and chlorine-doped amorphous carbon (a-C:Cl). The a-C:H films deposited from neopentane and nitrogen have the lowest refractive index and the highest bandgap. The a-C:Cl films exhibit a strong infrared peak at about 1560 cm-1 indicating that they may contain a large amount of microcrystalline graphite.
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Mark B. Moran, Mark B. Moran, Linda F. Johnson, Linda F. Johnson, } "Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition", Proc. SPIE 3060, Window and Dome Technologies and Materials V, (27 June 1997); doi: 10.1117/12.277064; https://doi.org/10.1117/12.277064
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