13 August 1997 64 x 64, 128 x 128, 240 x 320 pixel uncooled IR bolometric detector arrays
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Abstract
Several prototypes of individual VO2-based bolometric detectors and their arrays consisting of 64 by 64, 128 by 128 and 240 by 320 pixels are presented. The fabrication method and the device characterization results are described. Three types of readout integrated circuits for the arrays are also presented. A custom vacuum package for the IR bolometric detector arrays is descried.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hubert Jerominek, Hubert Jerominek, Timothy D. Pope, Timothy D. Pope, Martin Renaud, Martin Renaud, Nicholas R. Swart, Nicholas R. Swart, Francis Picard, Francis Picard, Mario Lehoux, Mario Lehoux, Simon Savard, Simon Savard, Ghislain Bilodeau, Ghislain Bilodeau, Danick Audet, Danick Audet, Linh Ngo Phong, Linh Ngo Phong, Chu Nong Qiu, Chu Nong Qiu, } "64 x 64, 128 x 128, 240 x 320 pixel uncooled IR bolometric detector arrays", Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); doi: 10.1117/12.280342; https://doi.org/10.1117/12.280342
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