13 August 1997 Differential rotationally shearing interferometer: implementation concept
Author Affiliations +
A new type of interferometer, a differential rotationally shearing interferometer, differs from the traditional rotationally shearing interferometer in that the angle of rotation is infinitesimal or, at least, very small. A differential rotationally shearing interferometer may be used for the detection of wavefront asymmetry even when its asymmetry is very small. We present an implementation concept for the differential rotationally shearing interferometer, based on the Mach-Zehnder interferometer. One of the important advantages of the new interferometer is that the polarization problems do not arise do the small angle of rotation between the two wavefronts.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gonzalo Paez-Padilla, Gonzalo Paez-Padilla, Marija Scholl, Marija Scholl, } "Differential rotationally shearing interferometer: implementation concept", Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); doi: 10.1117/12.280323; https://doi.org/10.1117/12.280323


Interferometric patterns of vectorial shearing interferometer
Proceedings of SPIE (December 06 1999)
Nonlinearity-reduced interferometer
Proceedings of SPIE (November 27 2007)
Spatial phase-shifting lateral shearing interferometer
Proceedings of SPIE (February 02 2009)
Improved straightness interferometer for nanometrology
Proceedings of SPIE (February 10 2005)
Versatility of the vectorial shearing interferometer
Proceedings of SPIE (February 08 2002)

Back to Top