13 August 1997 Effect of buffer layer on the voltage responsivity of the pyroelectric thermal sensors prepared with PZT ceramics
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Abstract
The pyroelectric thermal detectors were prepared with lead zirconate titanate (PZT) ceramics, where a signal electrode had a structure of Au/metallic buffer/(PZT ceramic). The effect of buffer layer on the voltage responsivity was investigated with a response to step signal, taken by dynamic pyroelectric measurement. Pyroelectric ceramic wafer was prepared by mixed oxide technique. Au layer (thickness: 50 nm) and metallic buffers (thickness: 0 - 20 nm) of Cr, NiCr (80/20), and Ti were prepared by dc magnetron sputtering. In order to improve the light absorptivity, an Au-black was coated on Au signal electrode by thermal evaporation. At steady state, the output voltage (Vo) was decreased with increasing chopping frequency in the range of 1 - 100 Hz. A sensor without buffer showed the severe time-drift and instability in the output signal. However, the sensors with buffer layer showed the stable outputs. For step radiations, rising time (tp), peak voltage (Vp), and initial slope (k) of the output voltage were dependent upon the thickness and materials of buffer layer. The mechanical and electrical contacts between Au electrode and PZT ceramics were improved by inserting the metallic buffer layer. Considering the characteristics of the output voltage, the optimum thickness of buffer layer was about 15 - 20 nm, and the sensors with Ti buffer of 15 - 20 nm in thickness showed the good detectivity. Therefore, the stability and reliability of the thermal sensors could be improved by use of appropriate buffer layer.
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Moon-Ho Lee, Moon-Ho Lee, Ha Ryong Hwang, Ha Ryong Hwang, Seong-Ho Bae, Seong-Ho Bae, } "Effect of buffer layer on the voltage responsivity of the pyroelectric thermal sensors prepared with PZT ceramics", Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); doi: 10.1117/12.280336; https://doi.org/10.1117/12.280336
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