13 August 1997 MgO micromachining for superconductor focal plane arrays
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Abstract
The construction of superconductor focal planes for infrared or millimeter wave imaging requires that the substrate of superconductor films be micromachined into thermal isolation structures or horn cavities. Wet etching was used to create cavities in the MgO substrate of high Tc BiPbSrCaCuO films. Processes for lithography of metal patterns on superconductor films were also devised. It was found that cavities with a wall angle of 55 - 60 degrees could be formed in (100) MgO using solutions of HNO3:CH3COOH or H3PO4. The MgO normal etch rates of these solutions were found to be respectively 117 and 27 micrometer/hour. Thermal evaporation and magnetron rf sputtering were used to prepare Au and Ag films on BiPbSrCaCuO and MgO; however, only the sputtered films showed adequate film adhesion. Electric contacts and dipoles made of Au or Ag could be created by wet etching in a solution of KI-I without apparent degradation of the superconductivity of BiPbSrCaCuO.
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Christine Alain, Christine Alain, Linh Ngo Phong, Linh Ngo Phong, Ishiang Shih, Ishiang Shih, "MgO micromachining for superconductor focal plane arrays", Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); doi: 10.1117/12.280317; https://doi.org/10.1117/12.280317
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