13 August 1997 Quantitative and imaging performance of uncooled microbolometer sensors
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Abstract
Lockheed Martin IR Imaging Systems is developing low cost, high performance, uncooled infrared imaging products for both military and commercial applications. These products are based on the microbolometer technology, a silicon micromachined sensor that combines wafer level silicon processing with a device structure capable of yielding excellent imaging performance. Here we report on the latest technical improvements and performance of an uncooled sensor as measured through laboratory and field testing. The performance of our uncooled sensor has been measured to determine sensor capabilities for insertion into both military and commercial products. Linearity of the sensor over a scene temperature range of 95 degrees Celsius is less than 0.5%. Our sensors typically have temporal NETDs of less than 70 mK as well as spatial NETDs of less than 50 mK. MRTD performance is less than 0.4 degrees Celsius at spatial frequencies more than 20% beyond Nyquist. Sensor stability over time has been measured and found to meet both commercial and military requirements. Spatial noise over a wide scene temperature range is reported as well as other test results. Video is used to demonstrate sensor performance capabilities in a variety of applications.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles A. Marshall, Charles A. Marshall, Thomas B. Breen, Thomas B. Breen, Margaret Kohin, Margaret Kohin, Walter Watson, Walter Watson, Robert Murphy, Robert Murphy, Neal R. Butler, Neal R. Butler, Todd W. Parker, Todd W. Parker, Lou Perich, Lou Perich, } "Quantitative and imaging performance of uncooled microbolometer sensors", Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); doi: 10.1117/12.280338; https://doi.org/10.1117/12.280338
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