Paper
24 July 1997 LLNL's acoustic spectrometer
John Baker
Author Affiliations +
Abstract
This paper describes the development of a frequency sensitive acoustic transducer that operates in the 10 Hz to 10 kHz regime. This device uses modern silicon microfabrication techniques to form mechanical times that resonate at specified frequencies. This high-sensitivity device is intended for low-power battery powered applications.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John Baker "LLNL's acoustic spectrometer", Proc. SPIE 3081, Peace and Wartime Applications and Technical Issues for Unattended Ground Sensors, (24 July 1997); https://doi.org/10.1117/12.280641
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KEYWORDS
Acoustics

Capacitance

Signal detection

Spectroscopy

Sensors

Electrodes

Silicon

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