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2 April 1997 Comprehensive optical diagnostics of IR-sensitive film structures
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Proceedings Volume 3091, Laser Applications Engineering (LAE-96); (1997)
Event: International Symposium on Intensive Laser Actions and Their Applications and Laser Applications Engineering, 1996, St. Petersburg-Pushkin, Russian Federation
Principles of the integrated optical noninvasive inspections (or nondestructive testing) of the material quality are considered. It is well known, that different optical methods allow us to obtain 2-dimensional spatial distributions of parameters most required for tested materials. The aim of this contribution is to elaborate ways of comprehensive using of optical techniques (photometry, reflectivity, scattering, interferometry, holography, polarization, luminescence and so on). The special feature of proposed set up is the modular construction and high flexibility in design, i.e. it is possible to adapt our equipment to different kinds of automated testing techniques. Considered methods and setup were applied to the investigation of wide range of subjects, e.g. solid natural or artificial materials, liquid crystals, microporous or fractal matrix, solutions, biological specimens. In this paper the only results, concerned with semiconductor wafers of film- structures, are discussed. The experimental verifications and arbitrary electrophysical measurements are included.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sergey C. Stafeev "Comprehensive optical diagnostics of IR-sensitive film structures", Proc. SPIE 3091, Laser Applications Engineering (LAE-96), (2 April 1997); doi: 10.1117/12.271780;

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