2 April 1997 Micromachining with DUV lasers
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Proceedings Volume 3091, Laser Applications Engineering (LAE-96); (1997) https://doi.org/10.1117/12.271775
Event: International Symposium on Intensive Laser Actions and Their Applications and Laser Applications Engineering, 1996, St. Petersburg-Pushkin, Russian Federation
In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other micro-components for medicine, chemistry or optics allow minimal invasive surgery and inspection. In every case conventional fabrication technologies such as turning and milling have to be carefully investigated: their appropriateness for the production of micro-parts is not always guaranteed. On the other hand new technologies such as the LIGA-process (German acronym for lithography, galvano forming and plastic molding process) open new ways to inexpensive mass-production. The following paper describes the potential of DUV-lasers (laser wavelength: lambda equals 200 - 280 nm) for micro-machining specific applications. Using excimer-lasers the machining of ceramics, glass and polymer materials is presented. The excellent beam properties of a self developed quadrupled Nd:YAG-laser are used for the repair of photolithographic masks. The mask repair using ablation and deposition of chromium on glass substrate is described.
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Hans Kurt Toenshoff, Hans Kurt Toenshoff, Heiner Kappel, Heiner Kappel, Peter B. Heekenjann, Peter B. Heekenjann, } "Micromachining with DUV lasers", Proc. SPIE 3091, Laser Applications Engineering (LAE-96), (2 April 1997); doi: 10.1117/12.271775; https://doi.org/10.1117/12.271775

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