Precision materials processing in microelectronics with a 10 W copper bromide laser

Jerzy Mizeraczyk; A. Otta; Mostefa Mohamed-Seghir; J. Wasilewski; A. Jurewicz; W. Janke; Chris E. Little; Nikola V. Sabotinov; Ewan S. Livingstone; I. Z. Kostadinov

doi:10.1117/12.270237

4 April 1997 Precision materials processing in microelectronics with a 10-W copper-bromide laser

Jerzy Mizeraczyk, A. Otta, Mostefa Mohamed-Seghir, J. Wasilewski, A. Jurewicz, W. Janke, Chris E. Little, Nikola V. Sabotinov, Ewan S. Livingstone, I. Z. Kostadinov

Author Affiliations +

Proceedings Volume 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1997) https://doi.org/10.1117/12.270237
Event: XI International Symposium on Gas Flow and Chemical Lasers and High Power Laser Conference, 1996, Edinburgh, United Kingdom

Abstract

In this contribution experimental results in high-precision processing of various reflecting metals employed in microelectronics carried out with a 10 W copper bromide laser are presented.

Citation Download Citation

Jerzy Mizeraczyk, A. Otta, Mostefa Mohamed-Seghir, J. Wasilewski, A. Jurewicz, W. Janke, Chris E. Little, Nikola V. Sabotinov, Ewan S. Livingstone, and I. Z. Kostadinov "Precision materials processing in microelectronics with a 10-W copper-bromide laser", Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (4 April 1997); https://doi.org/10.1117/12.270237

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