4 April 1997 Stability of a 1-kW excimer laser with long optical pulses
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Proceedings Volume 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1997); doi: 10.1117/12.270207
Event: XI International Symposium on Gas Flow and Chemical Lasers and High Power Laser Conference, 1996, Edinburgh, United Kingdom
Abstract
For high repetition operation of excimer-lasers care has to be taken of the changing performance of the electrical circuit, gas dynamic effects and contamination of the gas mixture to avoid deterioration of the laser performance. The parameters that influence the stability of the discharge are discussed. With the proper settings 1 kW of average power can be reached.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John C.M. Timmermans, Thomas Hofmann, Frederik A. van Goor, Wilhelmus J. Witteman, "Stability of a 1-kW excimer laser with long optical pulses", Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (4 April 1997); doi: 10.1117/12.270207; http://dx.doi.org/10.1117/12.270207
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KEYWORDS
Electrodes

Laser optics

Electrons

Capacitors

Pulsed laser operation

X-rays

Contamination

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