Spectroscopic studies during pulsed laser ablation deposition of C-N films

S. Acquaviva; A. P. Caricato; M. L. De Giorgi; Armando Luches; Alessio Perrone

doi:10.1117/12.271684

4 April 1997 Spectroscopic studies during pulsed laser ablation deposition of C-N films

S. Acquaviva, A. P. Caricato, M. L. De Giorgi, Armando Luches, Alessio Perrone

Proceedings Volume 3093, Nonresonant Laser-Matter Interaction (NLMI-9); (1997) https://doi.org/10.1117/12.271684
Event: Nonresonant Laser-Matter Interaction, 1996, St. Petersburg, Russian Federation

Abstract

Time-integrated optical emission spectra were recorded during XeCl laser ablation of graphite targets in vacuo and in low pressure (up to 2.5 mbar) N₂ and NH₃ atmospheres. The emission spectra of the laser induced plasma plume recorded during ablation in vacuo are dominated by the bands of the C₂ Swan system. Weaker bands from CN are well evident. Spectra recorded during ablation in NH₃ are also dominated by the bands of the C₂ Swan system. During ablation in N₂ (10^-4 - 2.5 mbar), strong bands of the CN violet system are detected. Their intensities increase with increasing N₂ pressure and with increasing distance from the graphite target. Mass spectra were recorded during ablation in vacuo (10^-6 mbar) and in N₂ at 1 multiplied by 10^-4 mbar. In vacuo, during the first stage of ablation, the mass spectra are characterized by the peaks at 12 and 26 a.m.u. (C and CN). The CN peak intensity decreases with the laser pulse number, to disappear after approximately 3000 laser pulses. In contrast, the peak at 26 a.m.u. is permanent during the whole ablation when N₂ is introduced in the chamber.

Citation Download Citation

S. Acquaviva, A. P. Caricato, M. L. De Giorgi, Armando Luches, and Alessio Perrone "Spectroscopic studies during pulsed laser ablation deposition of C-N films", Proc. SPIE 3093, Nonresonant Laser-Matter Interaction (NLMI-9), (4 April 1997); https://doi.org/10.1117/12.271684

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