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4 April 1997 Spectroscopic studies during pulsed laser ablation deposition of C-N films
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Proceedings Volume 3093, Nonresonant Laser-Matter Interaction (NLMI-9); (1997) https://doi.org/10.1117/12.271684
Event: Nonresonant Laser-Matter Interaction, 1996, St. Petersburg, Russian Federation
Abstract
Time-integrated optical emission spectra were recorded during XeCl laser ablation of graphite targets in vacuo and in low pressure (up to 2.5 mbar) N2 and NH3 atmospheres. The emission spectra of the laser induced plasma plume recorded during ablation in vacuo are dominated by the bands of the C2 Swan system. Weaker bands from CN are well evident. Spectra recorded during ablation in NH3 are also dominated by the bands of the C2 Swan system. During ablation in N2 (10-4 - 2.5 mbar), strong bands of the CN violet system are detected. Their intensities increase with increasing N2 pressure and with increasing distance from the graphite target. Mass spectra were recorded during ablation in vacuo (10-6 mbar) and in N2 at 1 multiplied by 10-4 mbar. In vacuo, during the first stage of ablation, the mass spectra are characterized by the peaks at 12 and 26 a.m.u. (C and CN). The CN peak intensity decreases with the laser pulse number, to disappear after approximately 3000 laser pulses. In contrast, the peak at 26 a.m.u. is permanent during the whole ablation when N2 is introduced in the chamber.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Acquaviva, A. P. Caricato, M. L. De Giorgi, Armando Luches, and Alessio Perrone "Spectroscopic studies during pulsed laser ablation deposition of C-N films", Proc. SPIE 3093, Nonresonant Laser-Matter Interaction (NLMI-9), (4 April 1997); https://doi.org/10.1117/12.271684
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