1 April 1997 Accuracy of traditional ellipsometry and complex ellipsometry-transmission photometry techniques for absorptive-film/transparent-substrate systems
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Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271824
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland
Abstract
The new method for the determination of the high absorptive thin film parameters is proposed. This technique consist in the complex ellipsometry + photometry measurements. The comparison of the principal parameters of the proposed technique and the traditional ellipsometry methods is carried out.
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A. M. Kostruba, A. M. Kostruba, Orest G. Vlokh, Orest G. Vlokh, } "Accuracy of traditional ellipsometry and complex ellipsometry-transmission photometry techniques for absorptive-film/transparent-substrate systems", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271824; https://doi.org/10.1117/12.271824
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