1 April 1997 Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method
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Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271822
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland
Abstract
The complex method of optical characterization of thin metal films with overlayers consisting of three types of measurements has ben developed and testified. It based on both transparency measurements and multi-angle reflectance ellipsometry including the surface plasmons excitation regime. The computation of layers thicknesses and their optical constants by the solution of the inverse ellipsometric problem using the modified method of general search and special choice of fitting function has been carried out. The method was used for Au and Ag layers evaporated on GaAs, InP or quartz substrates.
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Olga Yu. Borkovskaya, Olga Yu. Borkovskaya, Nikolas L. Dmitruk, Nikolas L. Dmitruk, Oksana V. Fursenko, Oksana V. Fursenko, } "Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271822; https://doi.org/10.1117/12.271822
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