1 April 1997 Comparison of the precision of a null-ellipsometer to an ellipsometer with a rotating analyzer
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Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271825
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland
Abstract
Comparison of the precision of measurements by means of null-ellipsometer with rotating analyzer is made here on the base of the developed formalism. The dependence of measurement's errors on the reflectivity of an investigated system is taken into account and is the base of the presented comparison.
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Eugene G. Bortchagovsky, Eugene G. Bortchagovsky, O. M. Getsko, O. M. Getsko, } "Comparison of the precision of a null-ellipsometer to an ellipsometer with a rotating analyzer", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271825; https://doi.org/10.1117/12.271825
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