1 April 1997 Thin-film analysis based on the ratio of envelopes of the reflectance spectra measured at two incident angles
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Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271839
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland
Abstract
Absolute reflectivity measurements are needed for the determination of optical parameters and the thickness of a film on an absorbing substrate by method of envelopes. In the article the ratio of minima and maxima envelopes of the reflectance spectra is introduced. This parameter allows to avoid absolute measurements. An application of the ratio measurements for the analysis of isotropic absorbing homogeneous films is described. Provided the film is transparent, the approach proposed leads to the simple analytical solution of an inverse problem.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Valery N. Filippov, Valery N. Filippov, } "Thin-film analysis based on the ratio of envelopes of the reflectance spectra measured at two incident angles", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271839; https://doi.org/10.1117/12.271839
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