28 July 1997 Hierarchical mask data design system (PROPHET) for aerial image simulation, automatic phase-shifter placement, and subpeak overlap checking
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Abstract
A hierarchical and interactive mask data design system (PROPHET) has been developed for aerial image simulation, fast subpeak overlap checking of adjacent patterns in attenuated phase-shifting masks, and automatic phase-shifter placement. This system, linked with a layout editor through an added-on menu, allows the designer to perform layout while concurrently considering mask data, taking into account design restrictions imposed by ultra-high resolution technology.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eiji Tsujimoto, Eiji Tsujimoto, Takahiro Watanabe, Takahiro Watanabe, Yoshio Sato, Yoshio Sato, Akemi Moniwa, Akemi Moniwa, Yoshinobu Igarashi, Yoshinobu Igarashi, Kyoji Nakajo, Kyoji Nakajo, } "Hierarchical mask data design system (PROPHET) for aerial image simulation, automatic phase-shifter placement, and subpeak overlap checking", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); doi: 10.1117/12.277250; https://doi.org/10.1117/12.277250
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