28 July 1997 Image sensing method and defect detection algorithm for a 256-Mb and 1-Gb DRAM mask inspection system
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Abstract
This paper describes an image sensing method and defect detection algorithm applied for a newly developed mask inspection system, the MC-2000, for 256 Mbit and 1 Gbit DRAM masks. The MC-2000, which utilizes i-line wavelength optics, is designed for less than 0.2 micrometer defect detection capability. An image sensing system employing a TDI (time delay integration) CCD image sensor is used for i-line image acquisition with an 80 Mpixel/sec data rate. Defect detection is done by comparing sensor image data with CAD data. Here we utilized our original differential comparison method which has very high sensitivity for defect detection.
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Hiromu Inoue, Kentaro Okuda, Takehiko Nomura, Hideo Tsuchiya, Mitsuo Tabata, "Image sensing method and defect detection algorithm for a 256-Mb and 1-Gb DRAM mask inspection system", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); doi: 10.1117/12.277286; https://doi.org/10.1117/12.277286
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