18 August 1997 Advanced concepts for UV laser beam shaping with non-rotationally symmetric optical elements
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Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.281092
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany
The potential of non-rotationally symmetric optical elements (NOEs) is demonstrated with respect to mask projection techniques with UV excimer laser radiation. NOEs are diamond turned mirrors with an almost arbitrary surface shape. The operation principle of the NOEs presented here is the concept of beam integration including beamlet shaping. Efficient and innovative processing is enabled by generating complex beam profiles adapted to the mask apertures demonstrated for the generation an annular shaped beam profile.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lars Unnebrink, Lars Unnebrink, Thomas F. E. Henning, Thomas F. E. Henning, Marcus Scholl, Marcus Scholl, Ernst-Wolfgang Kreutz, Ernst-Wolfgang Kreutz, } "Advanced concepts for UV laser beam shaping with non-rotationally symmetric optical elements", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); doi: 10.1117/12.281092; https://doi.org/10.1117/12.281092


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